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ISO14644-1、GB50073-2001Clean plant standard specification
ISO14644-1、GB50073-2001criterion standard of clean workshop

Class	Limited Class
	0.1um	0.2um	0.3um	0.5um	1um	5um
	（m3）	（m3）	（m3）	（m3）	（m3）	（m3）
1	10	2	/	/	/	/
2	100	24	10	4	/	/
3	1000	237	102	35	8	/
4	10000	2370	1020	352	83	/
5	100000	23700	10020	3520	832	29
6	1000000	237000	102000	35200	8320	293
7	/	/	/	352000	83200	2930
8	/	/	/	3520000	832000	29300
9	/	/	/	35200000	8320000	293000

Note: 1. At least 3 samples shall be taken for each collection point;
2. This standard shall not be used to represent the physical, chemical, radioactive and biological properties of suspended particles;
3. Determine 1 to 2 particle sizes according to the process requirements;
4. The  allowable concentration (Cn) of particles  required particle size D is determined by the formula, and the required particle size ranges from 0.1 to 5um, including 0.1um and 5um.


Where: Cn --  allowable concentration of particles  required particle size greater than or equal to (PC /m3). Cn is rounded to a close integer with no more than three significant digits.
N -- sell at Cha, such as application of words, not more than 9, cleanliness level intermediate between integer number can be according to 0.1 as the minimum allowed incremental change.
D -- required particle size (um).
0.1 -- constant, whose dimension is um.

United States federal standard
(FS209E)America federation standard (FS209E)

Class	Diameter of dust（um）
	01.	0.1	0.2	0.3	0.5	50
1	35	35	7.5	3	1	/
10	350	350	75	30	10	/
100	/	/	750	300	100	/
1000	/	/	/	/	1000	7
10000	/	/	/	/	10000	70
100000	/	/	/	/	100000	700

Classification of cleanliness grades of various trades

Industry classification	Cleanliness	Level
		01.μm class	1.000	10.000	100.000
		0.5μm级	10	100	1.000	10.000	100.000
	Use
Semiconductor industry	Crystal pulling		/
	Diffusion			/
	Corrosion, lithography, surface treatment, metal evaporation		/
	Assembly test			/
	Raw material				/
	Grind			/			/
	Packaging
	Semi-finished product storage					/
Laser industry	Gas laser			/
	Solid laser		/
	Semiconductor laser, laser scalpel			/
Optical instruments	Lens grinding			/
	Engraved scale			/
	Medical camera processing, assembly, lens assembly			/
	Film manufacturing, drying					/
	Microfilm, imaging, drying			/
	Assemble			/
	Paint, test, check					/
Timing and precision instruments	Electronic watches, parts assembly, rocket parts processing assembly			/
	Satellite control device		/
	High reliability component assembly			/
	Miniature bearing		/
	Plain bearing						/
	Assemble, inspect		/
Electronic calculator	Magnetic drum, tape, disk			/
	Processing, assembly, testing, inspection			/
Electromechanical and electronic calculation test	Tube			/	/
	High reliability tube, camera tube			/
	PCB					/
	Small relay			/
	Precision electrical instrument			/
	Parts, processing, assembly, inspection			/
Medicine, medicine and hospital	Pharmaceutical process			/
	Injection · ampoule sealed bottle			/
	Injection · ringer's solution · vaccine storage			/
	Aseptic operating room			/
	General operating room, recovery room, LCU, CCU			/
	Sterile ward			/
	Newborn babies and premature babies room			/
	Aseptic room, operation machinery storage room, aseptic animal experiment, bacterial experiment					/
	Reagent chamber			/
	General ward, examination room					/
Food production	Milk, wine, lactobacillus beverage			/
	Cool drink bottle, seal			/
	Dairy products, pastry packaging						/
	Ham slice manufacture, mushroom cultivation			/
	Meat processing				/